NEMS and Nanofabrication Prof. Francesc Pérez-Murano

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1 NEMS and Nanofabrication Prof. Francesc Pérez-Murano

2 July 18th, 1992 Nanolithography on Si(100) by STM 20 nm resolution in nm Local anodic oxidation by SPM NEMS and Nanofabricatio group

NEMS and Nanofabrication group Research on nanomechanical and nanoelectronic structures and devices applicable in miniaturized integrated

3 NEMS and Nanofabrication group Research on nanomechanical and nanoelectronic structures and devices applicable in miniaturized integrated systems: nanofabrication technologies, advanced AFM methods and functional properties. Free standing nanocantilever Thickness: 25 nm Width: 200 nm

integrated systems: nanofabrication technologies, advanced AFM methods

4 Nanolithography CNM clean room AFM e-beam writer UV-Nanoimprint SEM FIB (Dual beam) Thermal NIL

6 1985

7 Nanofabrication for nanoelectronics Today: >10 9 Transistors in one micro-processor Minimum dimension of transistor: 22 nm

8 DIRECTED SELF ASSEMBLY (DSA) SPIE Advanced lithography 2011, 2012, 2013 PLACYD

9 16 nm lines

11 Nanotubes and Nanowires

12 Alternative nanolithography AFM nanolithography FIB Nanofabrication AFM local anodic oxidation.j Vac. Sci.Technol. B 27, 2691 (2009); IEEE NEMS 2012

13 NEMS

14 Nanomechanical resonators 315 khz 1.8 MHz

83, 015002 (2012) Shi et al. Nanomedicine.

16 Nanomechanical sensors Biomolecular recognition Review of Scientific Instruments 83, (2012) Shi et al. Nanomedicine. 2012;7(10): Avidin-biotin bio-recognition event

18 AFM technology Polymeric AFM probes AFM Cantilevers with (insulated) conducting tips

19 Advanced AFM chracterization Quantitative nanomechanical characterization

22 Running projects SNM: Single Nanometer Manufacturing for beyond CMOS devices AIM4NP: Automated in-line Metrology for Nanoscale Production CoLiSa: Computational lithography for Self Assembly PLACYD: Pilot Line for directed self-assembly HEARTEN: A co-operative mhealth environment targeting adherence and management of patients suffering from Heart Failure. NEMS-BIO-2: Dispositivos micro/nano-electromecánicos avanzados para la detección de biomoléculas FORCE-for-FUTURE: Tecnologías de microscopía de fuerzas para aplicaciones en nanomecánica y nanomedicina SGR- NANOFABRICACION: Grup de Nanofabricació i propietats funcionals de nanoestructuras NANeau: Afinidad y estructura del agua interfacial sobre superficies nanoestructuradas en condiciones ambientales SiNSoC: Silicon Nanotube Solar Cells FP7-ICT ( ) FP7-NMP ( ) FP7-ICT ( ) FP7-ENIAC ( ) Horizon 2020 Health ( ) Plan Nacional MICINN-DG ( ) Consolider MICINN. ( ) Generalitat de Catalunya ( ) Plan Nacional MICINN-DG ( ) (Associat) AC-Explora Ingenio. ( )

24 Most relevant publications in 2014 From an Organometallic Monolayer to an Organic Monolayer Covered by Metal Nanoislands: A Simple Thermal Protocol for the Fabrication of the Top Contact Electrode in Molecular Electronic Devices. Advanced Materials Interfaces 1, (2014) Sub-10 nm Resistless Nanolithography for Directed Self-Assembly of Block Copolymers. ACS Applied Materials & Interfaces 6, (2014) High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators. Communications 5, 4313 (2014) Increasing the elastic modulus of graphene by controlled defect creation. Nature Physics. doi: /nphys3183. (2014) Nature Batch fabrication of insulated conductive scanning probe microscopy probes with reduced capacitive coupling. Microelectronic Engineering 119, (2014) H-bonding driven assembly of colloidal Au nanoparticles on nanostructured poly (styrene-b-ethylene oxide) block copolymer templates. Journal of Materials Science 49, (2014) Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation. Nanotechnology 25, (2014) On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography. Journal of Applied Crystallography 47, (2014) Towards the Fabrication of the Top Contact Electrode in Molecular Junctions by Photoreduction of a Metal Precursor. Chemistry-A European Journal 20, (2014) Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry. Nanofabrication. 1, (2014) Preparation of nascent molecular electronic devices from gold nanoparticles and terminal alkyne functionalised monolayer films, Journal of Materials Chemistry C 2, (2014) Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers. Nanofabrication 1, 8-15(2014)

25 NANONEMS.IMB-CNM.CSIC.ES

26 From CNM to the world: Post-docs ( )

27 GRUP DE NANOFABRICACIO I SISTEMES NANOELECTROMECANICS OFERTES PER TREBALLS D INVESTIGACIO ESTADES DE RECERCA I PRACTIQUES TREBALL FINALS DE CARRERA TREBALLS FINALS DE MASTER TESI DOCTORALS TEMA: NEMS, NANOFABRICACIO I AFM Requisits: Bon expedient acadèmic. Interès per la recerca. Interessats contactar amb: Prof. Francesc Pérez-Murano IMB-CNM, CSIC. UAB Francesc.Perez@CSIC.ES Telefono:

28 GRUP DE NANOFABRICACIO I SISTEMES NANOELECTROMECANICS OFERTES PER TREBALLS D INVESTIGACIO JAEINT_EX15_0581 (1-SEP a 31-OCT) o (1-OCT a 30 NOV) Exploring the limits of nanofabrication Interessats contactar amb: Prof. Francesc Pérez-Murano IMB-CNM, CSIC. UAB Francesc.Perez@CSIC.ES Telefono:

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